Stainless Steel MFC Gas Flow Controller for Semiconductor Processes
URL Slug: stainless-steel-mfc-gas-flow-controller-hot-n2
Product Summary
Introducing the Model HOT N2 MFC Gas Flow Controller, designed for high-precision gas delivery in semiconductor manufacturing. Engineered with stainless steel construction, it ensures durability and purity in demanding harsh gas environments. With a flow accuracy of ±1% F.S. and an adjustable range of 1-100 SLM, it delivers reliable and consistent flow control essential for critical processes.
Key Selling Points
- ±1% F.S. Accuracy: Achieve precise gas flow control, minimizing process variability and enhancing yield.
- Stainless Steel Construction: High corrosion resistance and compatibility with high-purity gases, ensuring long-term reliability.
- 1-100 SLM Wide Range: Flexible flow settings accommodate diverse process requirements.
- CE Certified: Compliant with EU LVD and EMC standards, ensuring safe operation in industrial settings.
- 24/7 Continuous Operation: Designed for rugged industrial environments, maintaining performance without interruption.
Technical Specifications
| Model | HOT N2 |
| Flow Accuracy | ±1% F.S. |
| Flow Range | 1-100 SLM |
| Material | Stainless Steel |
| Applicable Industry | Semiconductor Process Gas Flow Control |
| Certifications | CE (EN 60204-1:2018, EN IEC 61000-6-3:2021, EN IEC 61000-6-1:2019) |
Models and Options
Currently available as Model HOT N2, based on our core design. Please contact us for custom configurations tailored to your specific application.
Materials and Structure
The controller features a robust stainless steel body, providing excellent resistance to corrosion and high purity levels required in semiconductor gas systems. Its compact structure is designed for easy integration into existing gas delivery lines.
Applications
This MFC gas flow controller is ideal for semiconductor manufacturing processes involving precise gas flow control, particularly in high-purity environments such as:
- Semiconductor process gas delivery
- Chemical vapor deposition (CVD)
- Etching and ion implantation
- Metrology and cleanroom applications
Customization
We offer customization options for various flow ranges, materials, and communication protocols to meet your unique process requirements. Contact our engineers to discuss your project needs.
FAQ
What is the accuracy of this MFC?
The flow accuracy is ±1% of full scale (F.S.), ensuring precise control.
What flow range does it support?
It supports a flow range of 1-100 SLM (standard liters per minute).
Is it suitable for high-purity gases?
Yes, the stainless steel construction is designed for high-purity applications.
Does it have CE certification?
Yes, it is CE certified according to EN 60204-1:2018, EN IEC 61000-6-3:2021, and EN IEC 61000-6-1:2019.
Can it operate continuously?
Yes, it is designed for 24/7 continuous operation in industrial environments.
What is the minimum order quantity?
Please contact us for MOQ details as it can vary based on configuration.
How is the response time?
It is designed for fast response to meet dynamic process requirements, though specific figures should be provided by our technical team.
What is the warranty period?
We offer a standard warranty; please inquire for specific terms.
Inquiry Information
For pricing, delivery, and technical consultations, contact us at: Wendy (jwy@wxkeen.com) or call +86-0510-85161878 / +86-18921139517.
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